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Type: 
Journal
Description: 
The local structure of fluorine incorporated in crystalline silicon following solid phase epitaxial regrowth was investigated by means of x-ray absorption spectroscopy at the F K-edge. We clearly demonstrate that most F is found in SiF4 molecules in the crystalline matrix. A kinetic pathway, which explains our observation and which is also able to rationalize previous results in a common and coherent framework, is proposed.
Publisher: 
AIP
Publication date: 
7 Sep 2009
Authors: 

D De Salvador, G Bisognin, E Napolitani, M Mastromatteo, N Baggio, A Carnera, F Boscherini, G Impellizzeri, S Mirabella, S Boninelli, F Priolo, F Cristiano

Biblio References: 
Volume: 95 Issue: 10 Pages: 101908
Origin: 
Applied Physics Letters