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We review recent results of an extensive experimental study of ion implanted Mn–Ge(100) alloys fabricated by systematically varying the Mn dose (in the range 1–4 × 1016 at/cm2) and the Ge substrate temperature (from room temperature up to 300 °C) during the implantation. The samples have been investigated by means of X‐ray photoemission spectroscopy, scanning electron microscopy, transmission electron microscopy, electron energy loss spectroscopy, and scanning tunneling microscopy and spectroscopy. The combined investigation allows to determine, with an unprecedented deal of information at the nanometer scale, the morphological, structural, and electronic properties of such alloys. We evidence a porous to continuous transition in the surface morphology of the implanted layer when passing from 190 to 240 °C implantation substrate temperature. At higher implantation temperatures we directly …
Publication date: 
1 Jan 2007

Luca Ottaviano, Maurizio Passacantando, A Verna, P Parisse, S Picozzi, G Impellizzeri, F Priolo

Biblio References: 
Volume: 204 Issue: 1 Pages: 136-144
physica status solidi (a)