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Nano-Patterning of GST Thin Films by Self-Assembled Di-Block Copolymers Lithography

Type: 
Journal
Description: 
Publisher: 
Warrendale, Pa.; Materials Research Society; 1999
Publication date: 
1 Jan 2007
Authors: 

P La Fata, RA Puglisi, S Lombardo, S Privitera, MG Grimaldi, E Rimini

Biblio References: 
Volume: 997 Pages: 323
Origin: 
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
Link: 
http://scholar.google.com/scholar?cluster=2049792925865430933&hl=en&oi=scholarr

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